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Numerical Simulation of Optoelectronic Devices NUSOD 2011, Rome : Italie (2011)
Robust design of subwavelength grating mirror for mid-infrared VCSEL application
Christyves Chevallier 1, Frédéric Genty 1, Nicolas Fressengeas 1, Joel Jacquet 1
Marsupilami Collaboration(s)
(09/2011)

We present the design of a Si/Si3N4 subwavelength grating mirror optimized for an integration in mid-infrared VCSEL. The definition of a quality factor adapted to VCSEL requirements and maximized by an optimization algorithm allowed us to obtain a polarization selective and high reflectivity structure. The robustness with respect to fabrication error has been enhanced thanks to a precise study of the grating dimension tolerances.
1 :  Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS)
CNRS : UMR7132 – Université Paul Verlaine - Metz – SUPELEC
Physique/Physique/Optique
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