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Carboxylic acids as oxygen supplying agents for ALD of high k thin films

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https://hal.archives-ouvertes.fr/hal-00392103
Contributor : Chahla Domenget Connect in order to contact the contributor
Submitted on : Friday, June 5, 2009 - 3:06:36 PM
Last modification on : Tuesday, October 19, 2021 - 10:59:14 AM

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  • HAL Id : hal-00392103, version 1

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E. Rauwel, F. Ducroquet, P. Rauwel, M.-G. Willinger, I. Matko, et al.. Carboxylic acids as oxygen supplying agents for ALD of high k thin films. 8th International Conference on Atomic Layer Deposition,, Jun 2008, Bruges, Belgium. 2008. ⟨hal-00392103⟩

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