Ultra-high Q/V Fabry-Perot microcavity on SOI substrate

Philippe Velha (1, 2, 3) , E. Picard (2) , T. Charvolin (2) , E. Hadji (2) , Jean-Claude Rodier (3) , Philippe Lalanne (3) , David Peyrade (1)

1 LTM - Laboratoire des technologies de la microélectronique
2 DRFMC - Département de Recherche Fondamentale sur la Matière Condensée
3 Laboratoire Charles Fabry de l'Institut d'Optique / Naphel

We experimentally demonstrate an ultra high Q/V nanocavity on SOI substrate. The design is based on modal adaptation within the cavity and allows to measure a quality factor of 58.000 for a modal volume of 0.6(λ/n)3. This record Q/V value of 105 achieved for a structure standing on a physical substrate, rather than on membrane, is in very good agreement with theoretical predictions also shown. Based on these experimental results, we show that further refinements of the cavity design could lead to Q/V ratios close to 106.

Domaines: Optique [physics.optics]

Philippe Velha, E. Picard, T. Charvolin, E. Hadji, Jean-Claude Rodier, et al.. Ultra-high Q/V Fabry-Perot microcavity on SOI substrate. Optics Express, 2007, 15 (24), pp.16090-16096. ⟨hal-00394779⟩