Incidence of deposition parameters on the structural properties of Y2O3 grown by pulsed injection PE-MOCVD

C. Durand (1) , Corentin Vallée (1) , O. Salicio (1) , V. Loup (1) , M. Bonvalot (1) , O. Joubert (1) , C. Dubourdieu (2)

1 LTM - Laboratoire des technologies de la microélectronique
2 LMGP - Laboratoire des matériaux et du génie physique

C. Durand, Corentin Vallée, O. Salicio, V. Loup, M. Bonvalot, et al.. Incidence of deposition parameters on the structural properties of Y2O3 grown by pulsed injection PE-MOCVD. ECS 203th Meeting, 2003, paris, France. pp.Volume 2003-13. ⟨hal-00484647⟩