From planar to vertical nanowires field-effect transistors

G. Rosaz (1, 2) , B. Salem (1) , N. Pauc (2) , P. Gentile (2) , P. Periwal (1) , A. Potié (1) , T. Baron (1) , L. Latu-Romain (1) , S. David (1)

1 LTM - Laboratoire des technologies de la microélectronique
2 SiNaps - Silicon Nanoelectronics Photonics and Structures

Domaines: Matière Condensée [cond-mat]; Science des matériaux [cond-mat.mtrl-sci]

G. Rosaz, B. Salem, N. Pauc, P. Gentile, P. Periwal, et al.. From planar to vertical nanowires field-effect transistors. MRS proceeding, 2012, 1439 Symposium AA. ⟨hal-00777302⟩