Shielded Coplanar Striplines for RF Integrated Applications

Aziz M. Abdel (1) , Issa H. (1) , Kaddour D. (1) , Florence Podevin (1) , Safwat A.M.E. (2) , Emmanuel Pistono (1) , Duchamp J.-M. (1) , Anne Vilcot (1) , Fournier J.-M. (1) , Philippe Ferrari (1)

1 IMEP-LAHC - Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation
2 ASU - Ain Shams University

In this article, shielded coplanar striplines (S‐CPS) are studied to achieve slow‐wave transmission lines in a CMOS process. The slow‐wave propagation is achieved by placing floating strips below the CPS transmission line. The propagation parameters of such transmission lines are derived by simulations by means of a “full wave” 3D EM software. Quality factors as high as 35 at 10 GHz together with effective dielectric constants of 78 are reported. If these simulation results are confirmed by measurements, this would open the door to the possible realization of integrated transmission line‐based RF circuits such as power dividers, phase‐shifters, or filters of medium bandwidth below 10 GHz.

Mots clés: RF CMOS integrated circuits; Slow-Wave Propagation; Coplanar stripline; Quality Factor

Domaines: Micro et nanotechnologies/Microélectronique

Aziz M. Abdel, Issa H., Kaddour D., Florence Podevin, Safwat A.M.E., et al.. Shielded Coplanar Striplines for RF Integrated Applications. Microwave and Optical Technology Letters, 2009, 51 (1), pp.352-358. ⟨10.1002/mop.24054⟩. ⟨hal-01075033⟩