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hal-00266800v1  Journal articles
Tanguy LévéderStéfan LandisLaurent DavoustNicolas Chaix. Impact of planarization sheet addition on full wafer printing uniformity
MRS Online Proceedings Library, 2007, Symposium O – Nanostructured and Patterned Materials for Information Storage, 961, pp.0961-O02-06. ⟨10.1557/PROC-0961-O02-06⟩
hal-00204005v1  Conference papers
Tanguy LévéderStéfan LandisLaurent DavoustNicolas Chaix. Resist viscosity measurement for accurate nano-imprint simulation
32th International Conference on Micro- and Nano-Engineering (MNE 2006), 2006, Barcelona, Spain
hal-00203956v1  Conference papers
Tanguy LévéderStéfan LandisLaurent DavoustNicolas Chaix. Impact of planarization soft layers on full 200mm wafer imprinting uniformity
5th International Conference on Nanoimprint and Nanoprint Technology (NNT 2006), Nov 2006, San Fransisco, United States
hal-00204001v1  Conference papers
Tanguy LévéderStéfan LandisLaurent DavoustNicolas Chaix. Post-demolding pattern reflow in hot-embossing lithography
32th International Conference on Micro- and Nano-Engineering (MNE 2006), 2006, Barcelona, Spain