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hal-00462229v1  Conference papers
Mame Kouna TopDavid FuardVincent FarysYorick TrouillerPatrick Schiavone. OPC model error study through mask and SEM measurement error
Metrology, Inspection, and Process Control for Microlithography XXIV, Feb 2010, San Jose (CA), United States. in press
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hal-00394410v1  Conference papers
J. TallalT. Pinedo-RiveraK. BertonD. Peyrade. Single Nanostructure Device fabricated by alternative technologies
EIPBN - The 51st EIPBN Electron, Ion, Photon Beam Technology and Nanofabrication, May 2007, Denver, United States
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hal-00147888v1  Conference papers
A.L. PerrierO. ExshawJ.M. DuchampPhilippe Ferrari. A Semi-Lumped Miniaturized Spurious Less Frequency Tunable Three-port Divider\Combiner with 20 dB Isolation Between Output Ports
International Microwave Theory and Techniques Symposium, MTT-S, 2006, San Francisco, United States
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hal-01021210v1  Conference papers
Benjamin RocherFranck SchoefsMarc FrançoisArnaud Salou. Bayesian Updating of Probabilistic Time-Dependent Fatigue Model: Application to Jacket Foundations of Wind Turbines
EWSHM - 7th European Workshop on Structural Health Monitoring, IFFSTTAR, Inria, Université de Nantes, Jul 2014, Nantes, France
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hal-00168934v1  Conference papers
S. SoulanM. BesacierT. LevederP. Schiavone. In-line etching process control using dynamic scatterometry
Modeling Aspects in Optical Metrology, 2007, Munich, Germany. pp.11111, ⟨10.1117/12.726197⟩
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hal-00941631v1  Conference papers
Anna SzücsJonathan PlanchotVincent FarysEmek YesiladaClovis Alleaume et al.  Best focus shift mitigation for extending the depth of focus
Advanced Lithography, SPIE 2013, Feb 2013, San Jose, United States. ⟨10.1117/12.2011114⟩
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hal-00462233v1  Conference papers
P. SchiavoneM. MartinP. AlipourA.A EftekharS. Yegnanarayanan et al.  3D AFM Characterization of the Edge Roughness of Silicon High Q Resonators
Conference on Lasers and Electro-Optics 2010, May 2010, San Jose (CA), United States
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hal-00439902v1  Conference papers
Patrick SchiavoneEmmanuel PromayonYohan Payan. LASTIC: a Light Aspiration device for in vivo Soft TIssue Characterization
5th International Symposium on Biomedical Simulation ISBMS10, Jan 2010, Phoenix (AZ), United States. pp.1-10, ⟨10.1007/978-3-642-11615-5_1⟩
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hal-00461060v1  Conference papers
Mohamed El KodadiSébastien SoulanMaxime BesacierPatrick Schiavone. Dynamic scatterometry for profile control during resist trimming process
EIPBN 2009 - The 53rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, May 2009, Marco Island, United States