Skip to Main content Skip to Navigation


hal-00392103v1  Poster communications
E. RauwelF. DucroquetP. RauwelM.-G. WillingerI. Matko et al.  Carboxylic acids as oxygen supplying agents for ALD of high k thin films
8th International Conference on Atomic Layer Deposition,, Jun 2008, Bruges, Belgium. 2008