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hal-00455534v1  Conference papers
M. El KodadiM. BesacierS. SoulanPatrick Schiavone. General view of the in situ and real time scatterometry tool development
7Th Fraunhofer IISB Lithography simulation Workshop, 2009, Hersbruck, Germany
hal-00925794v1  Conference papers
E. Despiau-PujoM. BrihoumG. CungeMaxime DarnonN.S. Braithwaite et al.  Pulsed ICP plasmas processing : A combined modelling and experimental study
31st International Conference on Phenomena in Ionized Gases (ICPIG), Jul 2013, Granada, Spain
hal-00675093v1  Conference papers
C. Picart. Layer-by-layer films as reservoirs for rhBMP-2 delivery from a biomimetic surface
NanobioEurope 2009, Jun 2009, Grenoble, France
hal-00397007v1  Conference papers
E. RossittoD. PeyradeP. Reiss. Assembly of shape-controlled CdSe nanocrystals
2th International Meeting on Molecular Electronics Meeting, 2006, GRENOBLE, France
hal-00397011v1  Conference papers
T. Pinedo-RiveraJ. TallalM. GordonD. VempaireC. Ternon et al.  Dynamic study and control of gold colloidal drop evaporation
TNT Trends in Nanotechnology, 2006, Grenoble, France
hal-00397016v1  Conference papers
C. ValleeP. GononF. El KamelE. GourvestMyrtil L. Kahn et al.  Influence of Oxygen Vacancies on the Nonlinear Behavior of High-k MIM Capacitors
Proceedings of the 15th Workshop on Dielectrics in Microelectronics, WODIM 2008, 2008, Germany
hal-00397119v1  Conference papers
G. CungeR. RamosO. R. JoubertN. SadeghiM. Mori. Plasma/reactor wall interactions in gate etching processes
27th International symposium on dry process (DPS), 2005, jeju, South Korea
hal-00396870v1  Conference papers
K. FoubertL. LalouatB. CluzelD. PeyradeE. Picard et al.  Subwavelength mapping of light confinement in silicon slot waveguide devices
10thNFO International Conference on Near-Field Optics Nanophotonics and related Techniques, 2008, BUENOS AIRES, Argentina
hal-00396877v1  Conference papers
K. FoubertE. PicardB. CluzelD. PeyradeF. de Fornel et al.  Strong light confinement in ultra high Q air-slot coupled SOI nanocavities
PECS VIII The 8th International Photonic & Electromagnetic Crystal Structures Meeting, 2009, Sydney, Australia
hal-00397013v1  Conference papers
J. TallalT. Pinedo-RiveraM. GordonC. TernonK. Berton et al.  Real time imaging of dielectrophoresis integration of gold colloids into NIL devices
32th MNE International conference on Micro-Nano Enginerring, 2006, Barcelone, Spain
hal-00390368v1  Conference papers
P. VoisinM. ZelsmannC. GourgonJ. Boussey-Said. High Resolution silica molds fabrication for UV-Nanoimprint
Micro- and Nano-Engineering conference- MNE 2006, 2006, barcelone, Spain
hal-00390384v1  Conference papers
N. ChaixC. GourgonC. PerretS. DecossasS. Landis et al.  NIL processes and material characterization on transparent substrates for optical applications
Electron, Ion, and Photon Beam technology and Nanofabrication conference - EIPBN 2008, 2008, Portland, United States
hal-00390546v1  Conference papers
Corentin ValléeC. DurandB. PelissierM. BonvalotC. Dubourdieu et al.  Structural properties of high k Y2O3 layers prepared by Pulsed injection Plasma
Présentation MRS 2002 (fall meeting), 2002, Boston, United States
hal-00390630v1  Conference papers
C. TernonG. ReyN. ThireD. Bellet. Croissance de nanofils de ZnO en vue de la réalisation de cellules solaires à colorant
JA 2008 SF2M (Annual Meeting of the French society of metallurgy and materials), 2008, PARIS, France
hal-00399925v1  Conference papers
M. GallitreA. FarcyB. BlampeyC. BermondB. Flechet et al.  Prédiction des performances HF de réseaux d'interconnexions pour les générations CMOS avancées
16èmes Journées Nationales Microondes, May 2009, Grenoble, France
hal-00603672v1  Conference papers
Y. BaeK.-I. NaS. CristoloveanuW. XiongC.R. Cleavelin et al.  Special effects in triple gate MOSFETs fabricated on silicon-on-insulator (SOI)
International Semiconductor Conference, Oct 2009, Sinaia, Romania. pp.51-56
hal-00809053v1  Conference papers
T. GorisseM. ZelsmannL. DupréP. GentileM. Martin et al.  Guided Self Assembly of Porous Anodic Alumina by NanoImprinting Lithography
4th International Conference on NANO-structures SElf-Assembly - NANOSEA 2012, Jun 2012, Santa Margherita di Pula, Italy
hal-00809073v1  Conference papers
C. SimaoN. KehagiasD. BorahB. KosmalaM. Salaun et al.  Sub-20 nm nanofabrication via solvent-vapors nanoimprint directed selfassembly of block copolymers
Micro- and Nano-Engineering conference- MNE 2012, Sep 2012, Toulouse, France
hal-00809054v1  Conference papers
M. SalaunS. VayssièresS. ArchambaultC. SimaoN. Kehagias et al.  PS-b-PDMS nano-imprinting: A path for high throughput ultrahigh resolution lithography
Micro- and Nano-Engineering conference- MNE 2012, Sep 2012, Toulouse, France
hal-00494549v1  Conference papers
O. JoubertC. MongetL. VallierT. Weidman. Process optimization of plasma polymerized resists for advanced lithography applications
46th National AVS symposium & Topical conferences, 1999, Seattle, United States
hal-00494565v1  Conference papers
H.C LeeG.S. HwangH.S LeeK.P GiapisL. Desvoires et al.  Does mask charging influence sidewall trench formation ?
46th National AVS symposium & Topical conferences, 1999, Seattle, United States