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PECVD Microsensors Silicon Temperature Organic field effect transistors Chemical detection Active layer Low temperature electronics Polymer Organic electronic devices Chemical sensor Nanofils de silicium Gel/fluid phase transition Mid-IR Micro-resonators Copper Amorphous materials Stabilité électrique Thin films ICP-CVD Thermos-responsive surfactant system Electrical performance Stretchable electronics Photonics Microcapteur Fonctionnalisation de surface Silicium microcristallin Field effect transistors Doping Silicon nanowires TLM CMOS integrated circuits Low-cost silicon nanowires devices Nanofils Synthesis Resistor Deformation Spacer method Μ-Si doped Integrated photonics Sensor Strain gauge Density of states Microcrystalline silicon Thin film transistors Organic electronics Titanium nitride Carbon nanotubes Microfluidic Thin film circuits Microfluidique Fatty acid Flexible substrate Sphingomyelin Inkjet printing Silicium Microelectronics Deep UV polymer Polycrystalline silicon Low-frequency noise Sensitivity Polycrystalline materials Gas sensor In-situ doping Low temperature Plasma etching Microcapteurs Electrical stability Chalcogenide Méthode des espaceurs Sensors LPCVD Nanoribbons Flexible electronics Photoluminescence Thin Film Transistors Polysilicon PH Organic semiconductors Nanowires Photonic Low temperatures Functionalization Photodetector Organic field effect transistor Electrodes TFT Diazonium salts Basse température Chemical sensors Sphingomyelin lipids Couches minces SLS process Resistors Procédé SLS Polymers Reproducibilities Thin film Infrared CMOS compatible