μ-Si strain gauge array on flexible substrate for dynamic pressure measurement

F. Garcia Castro (1) , O. de Sagazan (1) , N Coulon (1) , A. Homs Corbera (2) , D. Fassini (2) , J. Cramer (2) , F. Le Bihan (1)

1 IETR - Institut d'Électronique et des Technologies du numéRique
2 Cherry Biotech

Low Temperature μ-Si layers have been deposited by Inductively Coupled Plasma Chemical Vapour Deposition (ICP-CVD) to produce strain gauges. These strain gauges performed on 25 μm thick flexible Kapton Polyimide (PI) were investigated in terms of Gauge Factor but also in dynamic mode through a homemade pneumatic test bench. Best strain gauge design has been identified and subsequently used to perform a 25 sensor array which was also tested using pulses and more complex signals. A simulation of blood pressure monitoring was performed to demonstrate the value of the technology.

Mots clés: Flexible electronics; ICP-CVD; PECVD; Strain gauges array; Thin film pressure sensor; dynamic pressure measurement; blood pressure monitoring; TLM; μ-Si doped

Domaines: Sciences de l'ingénieur [physics]

F. Garcia Castro, O. de Sagazan, N Coulon, A. Homs Corbera, D. Fassini, et al.. μ-Si strain gauge array on flexible substrate for dynamic pressure measurement. Sensors and Actuators A: Physical , 2020, 315, pp.112274. ⟨10.1016/j.sna.2020.112274⟩. ⟨hal-02960182v2⟩