Anatase TiO2 deposited at low temperature by pulsing an electron cyclotron wave resonance plasma source

B. Dey (1) , S. Bulou (1) , T. Gaulain (1) , W. Ravisy (2) , M. Richard-Plouet (2) , A. Goullet (2) , A. Granier (2) , P. Choquet (1)

1 LIST - Luxembourg Institute of Science and Technology
2 IMN - Institut des Matériaux Jean Rouxel

Domaines: Science des matériaux [cond-mat.mtrl-sci]

B. Dey, S. Bulou, T. Gaulain, W. Ravisy, M. Richard-Plouet, et al.. Anatase TiO2 deposited at low temperature by pulsing an electron cyclotron wave resonance plasma source. Scientific Reports, 2020, 10 (1), ⟨10.1038/s41598-020-78956-1⟩. ⟨hal-03109840⟩