Skip to Main content Skip to Navigation
New interface
Theses

Physical and electrical characterization of CVD graphene devices : towards large scale and flexible graphene electronics

Abstract : Throughout these few years, graphene has been rapidly proven to be a very promising material in the field of flexible and communicating electronics. Moreover, the chemical vapor deposition technique has allowed the synthesis of large-scale graphene, making the commercialization of graphene-based devices possible. Nevertheless, the fabrication process has not quite been understood at every step in order to overcome the most fundamental challenges in this field. In this work, a step-by-step structural and chemical characterization has been performed to study the properties of CVD-grown graphene, and the most crucial steps have been tackled in order to pave the way for flexible RF graphene-based devices on parylene substrates. We have found that the common large-scale techniques have yet to yield homogeneous graphene properties on the same sheet which results in wafer-scale graphene-devices with different performances. This highlights the need to encapsulate graphene. Parylene C was studied as a potential substrate for graphene devices, and sub-60 nm gate lengths RF devices have been fabricated, showing that the parylene-graphene combination could indeed be a very propitious solution to obtaining reproducible device performance.
Complete list of metadata

Cited literature [239 references]  Display  Hide  Download

https://theses.hal.science/tel-02894093
Contributor : ABES STAR :  Contact
Submitted on : Wednesday, July 8, 2020 - 5:23:36 PM
Last modification on : Thursday, March 17, 2022 - 4:40:23 PM
Long-term archiving on: : Monday, November 30, 2020 - 3:59:54 PM

File

NJEIM_Joanna_2018.pdf
Version validated by the jury (STAR)

Identifiers

  • HAL Id : tel-02894093, version 1

Citation

Joanna Njeim. Physical and electrical characterization of CVD graphene devices : towards large scale and flexible graphene electronics. Micro and nanotechnologies/Microelectronics. Sorbonne Université, 2018. English. ⟨NNT : 2018SORUS534⟩. ⟨tel-02894093⟩

Share

Metrics

Record views

161

Files downloads

10