Micro Mechanical Transducers Pressure Sensors, Accelerometers, and Gyroscopes, 2000. ,

Equivalent-circuit model of the squeezed gas film in a silicon accelerometer, Sensors and Actuators A 48, pp.239-248, 1995. ,

DOI : 10.1016/0924-4247(95)00995-7

Effect of Air Damping on the Dynamics of Nonuniform Deformations of Microstructures, pp.1093-1096, 1997. ,

Microplate Modeling under Coupled Structural-Fluidic-Electrostatic Forces, NSTI-Nanotech, pp.251-254, 2004. ,

Reduced order modelling of fluid structural interactions in MEMS based on modal projection techniques, Transducers'03, pp.1840-1843, 2003. ,

Generating efficient dynamical models for microelectromechanical systems from a few finite-element simulation runs, Journal of Microelectromechanical Systems, vol.8, issue.3, pp.280-289, 1999. ,

DOI : 10.1109/84.788632

A trajectory piecewise-linear approach to model order reduction and fast simulation of nonlinear circuits and micromachined devices, IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, vol.22, issue.2, pp.155-170, 2003. ,

DOI : 10.1109/TCAD.2002.806601