M. H. Bao, Micro mechanical transducers: pressure sensors, accelerometers and gyroscopes, Handbook of Sensors and Actuators, vol.8, 2000.

G. T. Kovacs, Micromachined Transducers Sourcebook, 1998.

E. M. Abdel-rahman and A. H. Nayfeh, Secondary resonances of electrically actuated resonant microsensors, Journal of Micromechanics and Microengineering, vol.13, issue.3, pp.491-501, 2003.
DOI : 10.1088/0960-1317/13/3/320

E. M. Abdel-rahman, Characterization of the mechanical behavior of an electrically actuated microbeam, Journal of Micromechanics and Microengineering, vol.12, issue.6, pp.759-766, 2002.
DOI : 10.1088/0960-1317/12/6/306

Q. Wang and W. H. Ko, Modeling of touch mode capacitive sensors and diaphragms, Sensors and Actuators A: Physical, vol.75, issue.3, pp.230-241, 1999.
DOI : 10.1016/S0924-4247(99)00068-0

G. W. Vogl and A. H. Nayfeh, A reduced-order model for electrically actuated clamped circular plates, Proceedings of DETC'03, 2003.

T. Veijola, Equivalent-circuit model of the squeezed gas film in a silicon accelerometer, Sensors and Actuators A: Physical, vol.48, issue.3, pp.239-248, 1995.
DOI : 10.1016/0924-4247(95)00995-7

L. Landau and E. Lifchitz, Théorie de l'élasticité, 1967.

C. M. Harris and A. G. Piersol, Harris' shock and vibration handbook, 2002.
DOI : 10.1063/1.3058391

M. Géradin and D. Rixen, Mechanical vibrations. Theory and application to structural dynamics, 1994.

A. H. Nayfeh and D. T. Mook, Nonlinear oscillations, 1979.

L. F. Shampine and M. W. Reichelt, The MATLAB ODE Suite, SIAM Journal on Scientific Computing, vol.18, issue.1, pp.1-22, 1997.
DOI : 10.1137/S1064827594276424
URL : https://hal.archives-ouvertes.fr/hal-01333731

P. M. Osterberg and S. D. Senturia, M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures, Journal of Microelectromechanical Systems, vol.6, issue.2, pp.107-118, 1997.
DOI : 10.1109/84.585788

E. W. Weisstein-mathworld and -. Resource, Basin of Attraction Handbook of differential equations, 1992.

J. Juillard and M. Cristescu, An inverse approach to the design of adaptive micro-mirrors, Journal of Micromechanics and Microengineering, vol.14, issue.3, pp.347-355, 2004.
DOI : 10.1088/0960-1317/14/3/006