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Simultaneous height, resistance and capacitance cartography of a SRAM test sample by conducting probe AFM

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Conference papers
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https://hal-supelec.archives-ouvertes.fr/hal-00320180
Contributor : Olivier Schneegans <>
Submitted on : Wednesday, September 10, 2008 - 2:22:43 PM
Last modification on : Wednesday, October 21, 2020 - 2:01:17 PM

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  • HAL Id : hal-00320180, version 1

Citation

Pascal Chrétien, Olivier Schneegans, Frédéric Houzé, René Meyer, Lionel Boyer. Simultaneous height, resistance and capacitance cartography of a SRAM test sample by conducting probe AFM. Seing at the Nanoscale II, 2004, France. ⟨hal-00320180⟩

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