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Investigation of nc-Si inclusions behaviour in multilayer a-Si:H films obtained by layer by layer technique

Alexander Gudovskikh 1 Jean-Paul Kleider 1 V.P. Afanasjev A.Z. Kazak-Kazakevich A.P. Sazanov
1 LGEP - Laboratoire de génie électrique de Paris
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https://hal-supelec.archives-ouvertes.fr/hal-00320870
Contributor : Olivier Schneegans <>
Submitted on : Thursday, September 11, 2008 - 5:33:36 PM
Last modification on : Wednesday, October 21, 2020 - 2:01:35 PM

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  • HAL Id : hal-00320870, version 1

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CNRS | SUPELEC | UPMC | SUP_LGEP | SORBONNE-UNIVERSITE

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Alexander Gudovskikh, Jean-Paul Kleider, V.P. Afanasjev, A.Z. Kazak-Kazakevich, A.P. Sazanov. Investigation of nc-Si inclusions behaviour in multilayer a-Si:H films obtained by layer by layer technique. Journal of Non-Crystalline Solids, Elsevier, 2004, 338-340, pp.135-138. ⟨hal-00320870⟩

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