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Polycrystalline AlN films deposited at low temperature for selective UV detectors

José Alvarez 1 Alexander Gudovskikh 1 Jean-Paul Kleider 1 V. Afanasjev V.V. Luchinin A.P. Sazanov E.I. Terukov
1 LGEP - Laboratoire de génie électrique de Paris
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https://hal-supelec.archives-ouvertes.fr/hal-00321026
Contributor : Olivier Schneegans <>
Submitted on : Friday, September 12, 2008 - 10:15:28 AM
Last modification on : Thursday, June 17, 2021 - 3:50:00 AM

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  • HAL Id : hal-00321026, version 1

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José Alvarez, Alexander Gudovskikh, Jean-Paul Kleider, V. Afanasjev, V.V. Luchinin, et al.. Polycrystalline AlN films deposited at low temperature for selective UV detectors. Sensors and Actuators A: Physical , Elsevier, 2004, 113, pp.355-359. ⟨hal-00321026⟩

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