Polycrystalline AlN films deposited at low temperature for selective UV detectors

Document type :
Journal articles
Complete list of metadatas

https://hal-supelec.archives-ouvertes.fr/hal-00321026
Contributor : Olivier Schneegans <>
Submitted on : Friday, September 12, 2008 - 10:15:28 AM
Last modification on : Wednesday, October 23, 2019 - 11:14:03 PM

Identifiers

  • HAL Id : hal-00321026, version 1

Citation

José Alvarez, Alexander Gudovskikh, Jean-Paul Kleider, V. Afanasjev, V.V. Luchinin, et al.. Polycrystalline AlN films deposited at low temperature for selective UV detectors. Sensors and Actuators A: Physical , Elsevier, 2004, 113, pp.355-359. ⟨hal-00321026⟩

Share

Metrics

Record views

157