Study of powders formed at low power in a silane-argon discharge and their effect on the properties of hydrogenated amorphous silicon thin films

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https://hal-supelec.archives-ouvertes.fr/hal-00321244
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Submitted on : Friday, September 12, 2008 - 4:15:12 PM
Last modification on : Monday, December 10, 2018 - 1:19:01 AM

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  • HAL Id : hal-00321244, version 1

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P. Chaudhuri, Namita Dutta Gupta, A. Bhaduri, Christophe Longeaud, S. Vignoli, et al.. Study of powders formed at low power in a silane-argon discharge and their effect on the properties of hydrogenated amorphous silicon thin films. Journal of Applied Physics, American Institute of Physics, 2005, 98, pp.44913. ⟨hal-00321244⟩

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