Namita Dutta Gupta, Christophe Longeaud, P. Chaudhuri, A. Bhaduri, S. Vignoli. Some Properties of amorphous carbon films deposited on the grounded electrode of a RF-PECVD reactor from Ar-CH4 mixtures.
21st International Conference on Amorphous and Nanocrystalline Semiconductors, 2005, Portugal.
⟨hal-00321707⟩