Skip to Main content Skip to Navigation
Conference papers

Some Properties of amorphous carbon films deposited on the grounded electrode of a RF-PECVD reactor from Ar-CH4 mixtures

Namita Dutta Gupta 1 Christophe Longeaud 1 P. Chaudhuri A. Bhaduri S. Vignoli
1 LGEP - Laboratoire de génie électrique de Paris
Document type :
Conference papers
Complete list of metadata
https://hal-supelec.archives-ouvertes.fr/hal-00321707
Contributor : Olivier Schneegans Connect in order to contact the contributor
Submitted on : Monday, September 15, 2008 - 4:52:59 PM
Last modification on : Thursday, June 17, 2021 - 3:48:32 AM

Identifiers

  • HAL Id : hal-00321707, version 1

Collections

CNRS | SUPELEC | UPMC | SUP_LGEP | SORBONNE-UNIVERSITE | EC-PARIS

Citation

Namita Dutta Gupta, Christophe Longeaud, P. Chaudhuri, A. Bhaduri, S. Vignoli. Some Properties of amorphous carbon films deposited on the grounded electrode of a RF-PECVD reactor from Ar-CH4 mixtures. 21st International Conference on Amorphous and Nanocrystalline Semiconductors, 2005, Portugal. ⟨hal-00321707⟩

Export

BibTeX TEI DC DCterms EndNote

Share

Metrics

Les métriques sont temporairement indisponibles