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Effect of evolution of powders on a-Si:H samples in silane-argon plasma at low power density

Namita Dutta Gupta 1 Christophe Longeaud 1 A. Bhaduri P. Chaudhuri S. Vignoli O. Marty
1 LGEP - Laboratoire de génie électrique de Paris
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Conference papers
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https://hal-supelec.archives-ouvertes.fr/hal-00321712
Contributor : Olivier Schneegans <>
Submitted on : Monday, September 15, 2008 - 4:57:34 PM
Last modification on : Wednesday, October 21, 2020 - 2:01:26 PM

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  • HAL Id : hal-00321712, version 1

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CNRS | SUPELEC | UPMC | SUP_LGEP | SORBONNE-UNIVERSITE

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Namita Dutta Gupta, Christophe Longeaud, A. Bhaduri, P. Chaudhuri, S. Vignoli, et al.. Effect of evolution of powders on a-Si:H samples in silane-argon plasma at low power density. 13th International Workshop on the Physics of Semiconductor Devices, 2005, India. ⟨hal-00321712⟩

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