Yrebegnan Moussa Soro, A. Abramov, Marie-Estelle Gueunier-Farret, E.V. Johnson, Christophe Longeaud, et al.. Device grade hydrogenated polymorphous silicon deposited at high rates.
22nd International Conference on Amorphous and Nanocrystalline Semiconductors, ICANS 22, 2007, United States.
⟨hal-00322281⟩