Device grade hydrogenated polymorphous silicon deposited at high rates

  Yrebegnan Moussa Soro ¹ AuthorId : 352923
Author

  A. Abramov AuthorId : 60322
Author

  Marie-Estelle Gueunier-Farret ¹ AuthorId : 351907
Author IdHAL : marie-gueunier-farret ORCID : https://orcid.org/0000-0003-1615-498X

  E.V. Johnson AuthorId : 352924
Author IdHAL : erikvjohnson ORCID : https://orcid.org/0000-0003-0920-2111

  Christophe Longeaud ¹ AuthorId : 166340
Author IdHAL : christophe-longeaud

  Pere Roca I Cabarrocas AuthorId : 359709
Author

  Jean-Paul Kleider ¹ AuthorId : 350896
Author IdHAL : jean-paul-kleider ORCID : https://orcid.org/0000-0003-4388-6326