Skip to Main content Skip to Navigation
Journal articles

Structural and optoelectronic properties of SiGe alloy thin films deposited by pulsed RF plasma CVD

Document type :
Journal articles
Complete list of metadata

https://hal-supelec.archives-ouvertes.fr/hal-00350895
Contributor : Olivier Schneegans Connect in order to contact the contributor
Submitted on : Wednesday, January 7, 2009 - 5:21:20 PM
Last modification on : Thursday, June 17, 2021 - 3:49:44 AM

Identifiers

  • HAL Id : hal-00350895, version 1

Citation

A. Bhaduri, P. Chaudhuri, D.L. Williamson, S. Vignoli, P.P. Ray, et al.. Structural and optoelectronic properties of SiGe alloy thin films deposited by pulsed RF plasma CVD. Journal of Applied Physics, American Institute of Physics, 2008, 104, pp.063709. ⟨hal-00350895⟩

Share

Metrics

Les métriques sont temporairement indisponibles