Device grade hydrogenated polymorphous silicon deposited at high rates

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Conference papers
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https://hal-supelec.archives-ouvertes.fr/hal-00351235
Contributor : Olivier Schneegans <>
Submitted on : Thursday, January 8, 2009 - 5:03:34 PM
Last modification on : Saturday, November 24, 2018 - 1:43:38 AM

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  • HAL Id : hal-00351235, version 1

Citation

Yrebegnan Moussa Soro, Marie-Estelle Gueunier-Farret, Christophe Longeaud, Jean-Paul Kleider. Device grade hydrogenated polymorphous silicon deposited at high rates. Journées annuelles de la SF2M 2008, Jun 2008, Paris, France. pp.CD-ROM. ⟨hal-00351235⟩

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