Micro mechanical transducers: pressure sensors, accelerometers and gyroscopes, Handbook of Sensors and Actuators, 2000. ,
Extending the validity of squeezed-film damper models with elongations of surface dimensions, Journal of Micromechanics and Microengineering, vol.15, issue.9, pp.1624-1636, 2005. ,
DOI : 10.1088/0960-1317/15/9/003
Influence of Boundary Conditions on the Dynamic Characteristics of Squeeze Films in MEMS Devices, Journal of Microelectromechanical Systems, vol.16, issue.4, pp.893-903, 2007. ,
DOI : 10.1109/JMEMS.2007.901135
Squeeze film air damping in MEMS, Sensors and Actuators A: Physical, vol.136, issue.1, pp.3-27, 2007. ,
DOI : 10.1016/j.sna.2007.01.008
Equivalent-circuit model of the squeezed gas film in a silicon accelerometer, Sensors and Actuators A: Physical, vol.48, issue.3, pp.239-248, 1998. ,
DOI : 10.1016/0924-4247(95)00995-7
Reduced-order modeling of fluid-structural interactions in MEMS based on modal projection techniques, 12 th International Conference on Solid-State Sensors, Actuators and Microsystems, pp.1840-1843, 2003. ,
Squeeze film damping effect on the dynamic response of a MEMS torsion mirror, Journal of Micromechanics and Microengineering, vol.8, issue.3, pp.200-208, 1998. ,
DOI : 10.1088/0960-1317/8/3/005
A new model for squeeze-film damping of electrically actuated microbeams under the effect of a static deflection, Journal of Micromechanics and Microengineering, vol.17, issue.7, pp.1242-1251, 2007. ,
DOI : 10.1088/0960-1317/17/7/005
Microplate Modeling under Coupled Structural-Fluidic-Electrostatic Forces, th International Conference on Modeling and Simulation of Microsystems, pp.251-254, 2004. ,
Modeling and Simulation of Microelectromechanical Systems in Multi-Physics Fields, Virginia Polytechnic Institute, 2004. ,
Simulation of Squeeze-Film Damping of Microplates Actuated by Large Electrostatic Load, Journal of Computational and Nonlinear Dynamics, vol.2, issue.3, pp.232-241, 2007. ,
DOI : 10.1115/1.2727491
A new approach to the modeling and simulation of flexible microstructures under the effect of squeeze-film damping, Journal of Micromechanics and Microengineering, vol.14, pp.170-181, 2004. ,
Simulation of gas damping in microstructures with nontrivial geometries, 11 th Annual International Workshop on Micro Electro Mechanical Systems, p.172177, 1998. ,
Squeeze-film damping for MEMS structures, 1998. ,
Macromodeling of coupled-domain MEMS devices with electrostatic and electrothermal effects, Journal of Micromechanics and Microengineering, vol.14, issue.8, pp.1190-1196, 2004. ,
DOI : 10.1088/0960-1317/14/8/011
Generating efficient dynamical models for microelectromechanical systems from a few finite-element simulation runs, Journal of Microelectromechanical Systems, vol.8, issue.3, pp.280-289, 1999. ,
DOI : 10.1109/84.788632
A Trajectory Piecewise-Linear Approach to Model Order Reduction of Nonlinear Dynamical Systems, 1998. ,
A trajectory piecewise-linear approach to model order reduction and fast simulation of nonlinear circuits and micromachined devices, IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, vol.22, issue.2, pp.155-170, 2003. ,
DOI : 10.1109/TCAD.2002.806601
Aubry A reduced-order model of squeeze-film damping for deformable structures including large displacement effects, submitted to Journal of microelectromechanical systems, 2007. ,