Enhancing the frequency stability of a NEMS oscillator with electrostatic and mechanical nonlinearities

Abstract : We show how to achieve large-amplitude oscillation and good frequency stability in a nonlinear NEMS oscillator by using a softening nonlinearity to locally balance the hardening behaviour of the Duffing nonlinearity for a given motion amplitude. The case when the softening behaviour is obtained via electrostatic biasing is theoretically investigated, under parallel-plate assumptions, for a fully-capacitive pulse-actuated resonant structure. This is validated by simulated data, in the case of a resonant clamped-clamped beam.
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Submitted on : Friday, January 8, 2010 - 2:35:46 PM
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Jérôme Juillard, Grégory Ardnt, Eric Colinet. Enhancing the frequency stability of a NEMS oscillator with electrostatic and mechanical nonlinearities. Eurosensors'09, Procedia Chemistry, Sep 2009, Lausanne, Switzerland. pp.1415-1418. ⟨hal-00445428⟩

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