Observation by conductive-probe atomic force microscopy of strongly inverted surface layers at the hydrogenated amorphous silicon/crystalline silicon heterojunctions

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Submitted on : Tuesday, January 18, 2011 - 3:01:37 PM
Last modification on : Wednesday, October 23, 2019 - 11:14:03 PM

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  • HAL Id : hal-00557102, version 1

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Olga Alexandrovna Maslova, José Alvarez, E.V. Gushina, Wilfried Favre, Marie-Estelle Gueunier-Farret, et al.. Observation by conductive-probe atomic force microscopy of strongly inverted surface layers at the hydrogenated amorphous silicon/crystalline silicon heterojunctions. Applied Physics Letters, American Institute of Physics, 2010, 97 (25), pp.252110. ⟨hal-00557102⟩

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