Robust design of subwavelength grating mirror for mid-infrared VCSEL application

Christyves Chevallier (1) , Frédéric Genty (1) , Nicolas Fressengeas (1) , Joel Jacquet (1)

1 LMOPS - Laboratoire Matériaux Optiques, Photonique et Systèmes

We present the design of a Si/Si3N4 subwavelength grating mirror optimized for an integration in mid-infrared VCSEL. The definition of a quality factor adapted to VCSEL requirements and maximized by an optimization algorithm allowed us to obtain a polarization selective and high reflectivity structure. The robustness with respect to fabrication error has been enhanced thanks to a precise study of the grating dimension tolerances.

Domaines: Optique [physics.optics]

Christyves Chevallier, Frédéric Genty, Nicolas Fressengeas, Joel Jacquet. Robust design of subwavelength grating mirror for mid-infrared VCSEL application. Numerical Simulation of Optoelectronic Devices NUSOD 2011, Sep 2011, Rome, Italy. 2 p. - ISBN:978-1-61284-877-8, ⟨10.1109/NUSOD.2011.6041173⟩. ⟨hal-00628591⟩