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Robust design of subwavelength grating mirror for mid-infrared VCSEL application

Abstract : We present the design of a Si/Si3N4 subwavelength grating mirror optimized for an integration in mid-infrared VCSEL. The definition of a quality factor adapted to VCSEL requirements and maximized by an optimization algorithm allowed us to obtain a polarization selective and high reflectivity structure. The robustness with respect to fabrication error has been enhanced thanks to a precise study of the grating dimension tolerances.
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https://hal-supelec.archives-ouvertes.fr/hal-00628591
Contributor : Christyves Chevallier <>
Submitted on : Monday, October 3, 2011 - 4:32:47 PM
Last modification on : Wednesday, April 8, 2020 - 4:04:24 PM
Long-term archiving on: : Tuesday, November 13, 2012 - 3:02:26 PM

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Christyves Chevallier, Frédéric Genty, Nicolas Fressengeas, Joel Jacquet. Robust design of subwavelength grating mirror for mid-infrared VCSEL application. Numerical Simulation of Optoelectronic Devices NUSOD 2011, Sep 2011, Rome, Italy. 2 p. - ISBN:978-1-61284-877-8, ⟨10.1109/NUSOD.2011.6041173⟩. ⟨hal-00628591⟩

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