A Low-Cost, Built-In Self-Test Method for Resistive MEMS sensors

Abstract : This paper illustrates the experimental application of the LIMBO method, an identification method based on binary observations dedicated to the (self-) test of integrated electronic and electromechanical systems, such as MEMS. The tested MEMS device is a micro-wire used as a heating resistor, inserted in a Wheatstone bridge. We show how the impulse response and the offset of the micro device are estimated only using binary inputs and outputs and straightforward calculations, which can easily be implemented on an FPGA. This approach only requires a 1-bit ADC and a 1-bit DAC, which makes it very amenable to integration and highlights its suitability for the test of systems based on resistive sensor and/or actuator.
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Submitted on : Tuesday, November 29, 2011 - 4:08:02 PM
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Olivier Legendre, H. Bertin, O. Garel, H. Mathias, S. Megherbi, et al.. A Low-Cost, Built-In Self-Test Method for Resistive MEMS sensors. Eurosensors XXV (Eurosensors'11), Sep 2011, Athens, Greece. pp.182-185. ⟨hal-00646316⟩

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