Interface properties of amorphous-crystalline silicon heterojunctions prepared using DC saddle-field PECVD

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https://hal-supelec.archives-ouvertes.fr/hal-00710771
Contributor : Olivier Schneegans <>
Submitted on : Thursday, June 21, 2012 - 3:53:14 PM
Last modification on : Friday, November 16, 2018 - 2:03:55 AM

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  • HAL Id : hal-00710771, version 1

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Basia Halliop, Marie-France Salaün, Wilfried Favre, Renaud Varache, Marie-Estelle Gueunier-Farret, et al.. Interface properties of amorphous-crystalline silicon heterojunctions prepared using DC saddle-field PECVD. ICANS24, Aug 2011, Nara, Japan. ⟨hal-00710771⟩

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