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Influence of the amorphous/crystalline silicon heterostructure properties on planar conductance measurements

Renaud Varache 1 Wilfried Favre 1 Lars Korte Jean-Paul Kleider 1
1 SCM - Equipe Semiconducteurs en Couches Minces
LGEP - Laboratoire de génie électrique de Paris
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Conference papers
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https://hal-supelec.archives-ouvertes.fr/hal-00710775
Contributor : Olivier Schneegans <>
Submitted on : Thursday, June 21, 2012 - 3:53:38 PM
Last modification on : Wednesday, October 21, 2020 - 2:01:00 PM

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  • HAL Id : hal-00710775, version 1

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Renaud Varache, Wilfried Favre, Lars Korte, Jean-Paul Kleider. Influence of the amorphous/crystalline silicon heterostructure properties on planar conductance measurements. ICANS24, Aug 2011, Nara, Japan. ⟨hal-00710775⟩

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