Electrical properties of µc-Si:H by conductive-probe AFM

José Alvarez 1 Jean-Paul Kleider 1 Pere Roca I Cabarrocas
1 SCM - Equipe Semiconducteurs en Couches Minces
LGEP - Laboratoire de génie électrique de Paris
Document type :
Conference papers
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https://hal-supelec.archives-ouvertes.fr/hal-00710778
Contributor : Olivier Schneegans <>
Submitted on : Thursday, June 21, 2012 - 3:53:41 PM
Last modification on : Friday, November 16, 2018 - 2:03:53 AM

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  • HAL Id : hal-00710778, version 1

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José Alvarez, Jean-Paul Kleider, Pere Roca I Cabarrocas. Electrical properties of µc-Si:H by conductive-probe AFM. E-MRS Fall Meeting 2011, Sep 2011, Varsovie, Poland. ⟨hal-00710778⟩

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