V. and R. M. Roukes, Low Voltage Nanoelectromechanical Switches Based on Silicon Carbide NanowiresSuspended-gate MOSFET: bringing new MEMS functionality into solid-state MOS transistorDesign considerations for complementary nanoelectromechanical logic gatesA nanomechanical switch for integration with CMOS logicForced Vibrations of a Beam with One-Sided, Nanoelectromechanical (NEM) relays integrated with CMOS SRAM for improved stability and low leakage, pp.2891-2896, 2005.

A. Constraint-theory and E. R. Puers, The autonomous impact resonator: A new operation principle for a silicon resonant strain gaugeIntegrated circuit design with NEM relays, International Conference on Solid-State Sensors and Actuators, pp.199-212, 1985.

]. S. Shaw and P. J. Holmes, A periodically forced piecewise linear oscillator, Journal of Sound and Vibration, vol.90, issue.1, pp.129-155, 1983.
DOI : 10.1016/0022-460X(83)90407-8

URL : https://hal.archives-ouvertes.fr/hal-01509017