Vertical-type Schottky-barrier photodiode using p-diamond epilayer grown on heavily boron-doped p+-diamond substrate

M. Imura Y. Koide M. Liao José Alvarez 1
1 SCM - Equipe Semiconducteurs en Couches Minces
LGEP - Laboratoire de génie électrique de Paris
Abstract : We investigate electrical and optical properties of a vertical-type Schottky-barrier photodiode (SPD) using a boron (B)-doped p-diamond epilayer grown on a heavily B-doped p+-diamond (100) substrate with B concentration ([B]) of 1 x 1020 cm-3 by microwave plasma chemical-vapor deposition. Surface morphology and [B] in the epilayer are strongly affected by the growth temperature (Tg). Smooth surface and low [B] of(3±2)x1015 cm-3 with an abrupt [B] profile at epilayer interface are reproducibly obtained for Tg lower than 900 °C The vertical-type SPD with a semitransparent WC Schottky contact is fabricated on an oxidized surface of the p-diamond epilayer. The SPDs with an ideality factor lower than 1.1 and a reverse leakage current less than 10-14 A are reproducibly obtained. The SPD is operable at zero or reverse bias mode with a fast response speed less than 1 s. The external quantum efficiency for 220-nm light illumination is measured to be almost constant value of3.5±0.5% with increasing the reverse bias voltage from 0 to 5 V before and after annealing at 400 °C for 10 min. It is found that the vertical-type SPD using p+-diamond substrate does not provide the photoconductivity gain property.
Document type :
Journal articles
Complete list of metadatas

https://hal-supelec.archives-ouvertes.fr/hal-00763182
Contributor : Olivier Schneegans <>
Submitted on : Monday, December 10, 2012 - 11:48:29 AM
Last modification on : Friday, December 14, 2018 - 1:31:47 AM

Identifiers

Citation

M. Imura, Y. Koide, M. Liao, José Alvarez. Vertical-type Schottky-barrier photodiode using p-diamond epilayer grown on heavily boron-doped p+-diamond substrate. Diamond and Related Materials, Elsevier, 2008, 17 (11), pp.1916-1921. ⟨10.1016/j.diamond.2008.04.012⟩. ⟨hal-00763182⟩

Share

Metrics

Record views

188