AlOx/GaAs high contrast grating mirrors for mid infrared VCSELs

Youness Laaroussi; Olivier Gauthier-Lafaye; Laurent Bouscayrol; Chantal Fontaine; Laurent Cerutti; Thierry Taliercio; Christyves Chevallier; Frédéric Genty; Nicolas Fressengeas; Guilhem Almuneau

AlOx/GaAs high contrast grating mirrors for mid infrared VCSELs

Youness Laaroussi ¹ Olivier Gauthier-Lafaye ¹ Laurent Bouscayrol ² Chantal Fontaine ¹ Laurent Cerutti ^{3, 4} Thierry Taliercio ^{3, 4} Christyves Chevallier ⁵ Frédéric Genty ⁵ Nicolas Fressengeas ⁶ Guilhem Almuneau ¹

1 LAAS-PHOTO - Équipe Photonique

LAAS - Laboratoire d'analyse et d'architecture des systèmes [Toulouse]

2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique

LAAS - Laboratoire d'analyse et d'architecture des systèmes [Toulouse]

3 IES - Institut d’Electronique et des Systèmes

4 NANOMIR - Composants à Nanostructure pour le moyen infrarouge

IES - Institut d’Electronique et des Systèmes

5 OPTEL - Equipe Optique et électronique pour les télécoms

6 LMOPS - Laboratoire Matériaux Optiques, Photonique et Systèmes

Abstract : High contrast gratings (HCG) have drained recently highly attractive perspectives for VCSEL devices through the wide potentialities for obtaining unique optical properties with these integrable optical elements, in contrast to conventional Bragg reflectors. Since most of the HCG approaches on III-V based photonic devices are based on semiconductor/air-gap structures, strong limitations are foreseen for the integration in practical lasers. We proposed to exploit the high refractive index contrast available in the AlOx/GaAs system for which the oxide is formed with the mature thermal wet oxidation technique. High reflective and polarization selective mirrors can thus been achieved monolithically by means of a VCSEL compatible process technology, in a wide spectral range from near to mid infrared. Jointly, the AlOx lateral confinement scheme is proposed for implementation in mid infrared emitters. We present in this paper the fabrication and performances of AlOx/GaAs HCG operating between 2.3 and 2.6 μm and their integration within oxide-confined mid-infrared electrically pumped VCSELs.

Keywords : thermal wet oxidation VCSEL AlOx Bragg reflectors High Contrast Grating (HCG)

Document type :

Conference papers

Domain :

Physics [physics] / Physics [physics] / Optics [physics.optics]

Complete list of metadatas

https://hal-supelec.archives-ouvertes.fr/hal-00772551
Contributor : Christyves Chevallier <>
Submitted on : Thursday, January 10, 2013 - 4:57:05 PM
Last modification on : Friday, June 14, 2019 - 6:31:23 PM

AlOx/GaAs high contrast grating mirrors for mid infrared VCSELs

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AlOx/GaAs high contrast grating mirrors for mid infrared VCSELs

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