FPGA implementation of a low-cost method for tracking the resonance frequency and the quality factro of MEMS sensors

Farbod Ghassemi 1 Maira Possas 1 Gilles Amendola 1 Jérome Juillard 2
1 ESIEE Paris
2 E3S - Supélec Sciences des Systèmes [Gif-sur-Yvette]
Abstract : This paper reports the hardware implementation of a low-cost parameter estimation method (LIMBO) and describes its use for tracking the parameters of a resonant MEMS sensor. We show how this method can be used to identify the impulse response (IR) of a sensor with minimal A/D-D/A requirements. Based on this IR, we develop digital estimators capable of extracting the resonance frequency and the quality factor. The full electronic architecture is simulated on a mixed-signal environment and implemented on FPGA-based digital hardware. For a specifically emulated sensor, results show that the resonance frequency can be identified and tracked from 3kHz up to 12kHz with a Normalized Square Error (NSE) of 1.38E-1. The quality factor is linearized with a correlation coefficient of 0.986 between Q=1 to Q=60. Those results can be easily scaled to any frequency range by adapting the sampling frequency.
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Farbod Ghassemi, Maira Possas, Gilles Amendola, Jérome Juillard. FPGA implementation of a low-cost method for tracking the resonance frequency and the quality factro of MEMS sensors. 2012 IEEE SENSORS, Oct 2012, Taipei, Taiwan. CD-ROM Proceedings (4 p.), ⟨10.1109/ICSENS.2012.6411033⟩. ⟨hal-00778760⟩

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