Deposition of microcrystalline silicon-carbon alloys by RF-PECVD and MDECR

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Conference papers
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https://hal-supelec.archives-ouvertes.fr/hal-00779004
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Submitted on : Monday, January 21, 2013 - 3:57:52 PM
Last modification on : Friday, November 16, 2018 - 2:03:49 AM

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  • HAL Id : hal-00779004, version 1

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Sofia Gaiaschi, E.V. Johnson, Pavel Bulkin, P. Chapon, Marie-Estelle Gueunier-Farret, et al.. Deposition of microcrystalline silicon-carbon alloys by RF-PECVD and MDECR. E-MRS Spring Meeting 2012, May 2012, Strasbourg, France. ⟨hal-00779004⟩

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