Skip to Main content Skip to Navigation
Conference papers

Caracterisations structurales et electriques de μc-Si1−xCx :H deposes par RF-PECVD

Document type :
Conference papers
Complete list of metadata

https://hal-supelec.archives-ouvertes.fr/hal-00781749
Contributor : Olivier Schneegans <>
Submitted on : Monday, January 28, 2013 - 12:02:41 PM
Last modification on : Thursday, June 17, 2021 - 3:48:05 AM

Identifiers

  • HAL Id : hal-00781749, version 1

Citation

Sofia Gaiaschi, R. Ruggeri, E.V. Johnson, Pavel Bulkin, Marie-Estelle Gueunier-Farret, et al.. Caracterisations structurales et electriques de μc-Si1−xCx :H deposes par RF-PECVD. JNPV 2012, Dec 2012, Chantilly, France. ⟨hal-00781749⟩

Share

Metrics

Record views

92