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Caracterisations structurales et electriques de μc-Si1−xCx :H deposes par RF-PECVD

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https://hal-supelec.archives-ouvertes.fr/hal-00781749
Contributor : Olivier Schneegans <>
Submitted on : Monday, January 28, 2013 - 12:02:41 PM
Last modification on : Wednesday, October 21, 2020 - 2:01:22 PM

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  • HAL Id : hal-00781749, version 1

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Sofia Gaiaschi, R. Ruggeri, E.V. Johnson, Pavel Bulkin, Marie-Estelle Gueunier-Farret, et al.. Caracterisations structurales et electriques de μc-Si1−xCx :H deposes par RF-PECVD. JNPV 2012, Dec 2012, Chantilly, France. ⟨hal-00781749⟩

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