Influence of excitation waveform and oscillator geometry on the resonant pull-in of capacitive MEMS oscillators

Abstract : The purpose of this paper is to provide a simple framework for determining the resonant pull-in of MEMS oscillators, either parallel-plate, CC-beam or cantilever, under one- sided and two-sided sinusoidal, square-wave or pulse- actuation. Furthermore, the values of the resonant and static pull-in amplitudes are calculated and tabulated, in all the considered cases.
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https://hal-supelec.archives-ouvertes.fr/hal-00830533
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Submitted on : Wednesday, June 5, 2013 - 11:51:50 AM
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  • HAL Id : hal-00830533, version 1

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Jérome Juillard, Grégory Arndt, Julien Arcamone, Eric Colinet. Influence of excitation waveform and oscillator geometry on the resonant pull-in of capacitive MEMS oscillators. DTIP 2013, Apr 2013, Barcelona, Spain. pp.2-5. ⟨hal-00830533⟩

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