Structural and electrical characterization of microcrystalline silicon-carbon alloys deposited by RF-PECVD

Sofia Gaiaschi 1 R. Ruggeri E.V. Johnson Pavel Bulkin Marie-Estelle Gueunier-Farret 1 Christophe Longeaud 1 G. Mannino Jean-Paul Kleider 1 P. Chapon
1 SCM - Equipe Semiconducteurs en Couches Minces
LGEP - Laboratoire de génie électrique de Paris
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Conference papers
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https://hal-supelec.archives-ouvertes.fr/hal-00931313
Contributor : Thierry Leblanc <>
Submitted on : Wednesday, January 15, 2014 - 11:29:52 AM
Last modification on : Tuesday, October 8, 2019 - 3:20:10 PM

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  • HAL Id : hal-00931313, version 1

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Sofia Gaiaschi, R. Ruggeri, E.V. Johnson, Pavel Bulkin, Marie-Estelle Gueunier-Farret, et al.. Structural and electrical characterization of microcrystalline silicon-carbon alloys deposited by RF-PECVD. E-MRS Spring Meeting 2013, May 2013, Strasbourg, France. ⟨hal-00931313⟩

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