Structural and electrical characterization of microcrystalline silicon-carbon alloys deposited by RF-PECVD

Sofia Gaiaschi ¹ AuthorId : 808126
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R. Ruggeri AuthorId : 41200
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E.V. Johnson AuthorId : 352924
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Pavel Bulkin AuthorId : 808127
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Marie-Estelle Gueunier-Farret ¹ AuthorId : 351907
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Christophe Longeaud ¹ AuthorId : 166340
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G. Mannino AuthorId : 810762
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Jean-Paul Kleider ¹ AuthorId : 350896
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P. Chapon AuthorId : 441813
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