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Coplanar conductance measurements and modeling to characterize surface passivation of c-Si wafers by a-Si:H

Igor P. Sobkowicz Parsathi Chatterjee Marie-Estelle Gueunier-Farret 1 Antoine Salomon Jean-Paul Kleider 1 P. Roca I Cabarrocas
1 SCM - Equipe Semiconducteurs en Couches Minces
LGEP - Laboratoire de génie électrique de Paris
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Conference papers
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https://hal-supelec.archives-ouvertes.fr/hal-00931340
Contributor : Thierry Leblanc <>
Submitted on : Wednesday, January 15, 2014 - 11:29:55 AM
Last modification on : Monday, December 14, 2020 - 12:29:05 PM

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  • HAL Id : hal-00931340, version 1

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CNRS | SUPELEC | UPMC | SUP_LGEP | PHEMADIC | GEEPS | SORBONNE-UNIVERSITE | SUP_SCM | SU-SCIENCES

Citation

Igor P. Sobkowicz, Parsathi Chatterjee, Marie-Estelle Gueunier-Farret, Antoine Salomon, Jean-Paul Kleider, et al.. Coplanar conductance measurements and modeling to characterize surface passivation of c-Si wafers by a-Si:H. EUPVSEC 2013, Sep 2013, Paris, France. pp.1680 - 1685. ⟨hal-00931340⟩

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