Electrostatically-induced modal crosstalk phenomena in resonant MEMS sensors

Alexis Brenes 1, 2 Jérôme Juillard 1 Filipe Vinci dos Santos 2
2 Chaire Conception Analogique Avancée Thales/Supélec
Thales Communications [Colombes], E3S - Supélec Sciences des Systèmes [Gif-sur-Yvette]
Abstract : The aim of this paper is to introduce an explanation for the amplitude saturation and inhibition phenomena in resonant MEMS pressure sensors, via the electrostatic coupling of two resonance modes. Our analysis and experimental results reveal that these phenomena may be ubiquitous in electrostatic resonant MEMS sensors.
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Alexis Brenes, Jérôme Juillard, Filipe Vinci dos Santos. Electrostatically-induced modal crosstalk phenomena in resonant MEMS sensors. 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) , Apr 2014, Cannes, France. ⟨10.1109/DTIP.2014.7056659⟩. ⟨hal-01086397⟩

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