Conducting probe atomic force microscope as a relevant tool for studying some phenomena in MEMS switches

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Poster communications
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https://hal-supelec.archives-ouvertes.fr/hal-01099238
Contributor : Thierry Leblanc <>
Submitted on : Thursday, January 1, 2015 - 7:23:14 PM
Last modification on : Tuesday, May 14, 2019 - 11:05:03 AM

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  • HAL Id : hal-01099238, version 1

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Alexis Peschot, Maxime Vincent, Christophe Poulain, Denis Mariolle, Frédéric Houzé, et al.. Conducting probe atomic force microscope as a relevant tool for studying some phenomena in MEMS switches. GreenBAN 2014, Nov 2014, Paris, France. Proceedings of the International Workshop on Green Solutions for Body Area Networks, pp.63 - 66. ⟨hal-01099238⟩

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