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Low temperature hydrogenated microcrystalline silicon-carbon alloys deposited by RF-PECVD for photovoltaic application

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Conference papers
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https://hal-supelec.archives-ouvertes.fr/hal-01099573
Contributor : Thierry Leblanc <>
Submitted on : Sunday, January 4, 2015 - 6:30:27 PM
Last modification on : Wednesday, September 16, 2020 - 4:43:25 PM

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  • HAL Id : hal-01099573, version 1

Citation

Sofia Gaiaschi, E.V. Johnson, Marie-Estelle Gueunier-Farret, Christophe Longeaud, P. Chapon, et al.. Low temperature hydrogenated microcrystalline silicon-carbon alloys deposited by RF-PECVD for photovoltaic application. E-MRS Spring Meeting 2014, European Materials Research Society, May 2014, Lille, France. ⟨hal-01099573⟩

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