Structural and electrical properties of hydrogenated microcrystalline silicon-carbon alloys deposited at low substrate temperature by RF-PECVD

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https://hal-supelec.archives-ouvertes.fr/hal-01099579
Contributor : Thierry Leblanc <>
Submitted on : Sunday, January 4, 2015 - 7:11:29 PM
Last modification on : Tuesday, October 8, 2019 - 3:20:10 PM

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  • HAL Id : hal-01099579, version 1

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Sofia Gaiaschi, Marie-Estelle Gueunier-Farret, Christophe Longeaud, E.V. Johnson, P. Chapon, et al.. Structural and electrical properties of hydrogenated microcrystalline silicon-carbon alloys deposited at low substrate temperature by RF-PECVD. E-MRS Spring Meeting 2014, European Materials Research Society, May 2014, Lille, France. ⟨hal-01099579⟩

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