Influence of RF Plasma on Zinc Oxide Surface Properties

Alban Maertens 1 Samuel Margueron 1 Frédéric Genty 1 Ouarda Legrani 1 Thierry Belmonte 2 Pascal Boulet 2
1 LMOPS - Laboratoire Matériaux Optiques, Photonique et Systèmes
2 IJL - Institut Jean Lamour
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Conference papers
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https://hal-supelec.archives-ouvertes.fr/hal-01109404
Contributor : Sébastien van Luchene <>
Submitted on : Monday, January 26, 2015 - 11:50:54 AM
Last modification on : Wednesday, September 4, 2019 - 2:06:02 PM

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  • HAL Id : hal-01109404, version 1

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Citation

Alban Maertens, Samuel Margueron, Frédéric Genty, Ouarda Legrani, Thierry Belmonte, et al.. Influence of RF Plasma on Zinc Oxide Surface Properties. Compound Semiconductor Week, May 2014, Montpellier, France. ⟨hal-01109404⟩

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