A. , J. Farhang, and K. , Elastic-plastic contact model for rough surfaces based on plastic asperity concept, International Journal of Non-Linear Mechanics, vol.40, pp.495-506, 2005.

A. , G. G. Nosonovsky, and M. , Contact modeling -forces, Tribology International, vol.33, pp.431-442, 2000.

A. , N. Yeyati, A. L. Van-ruitenbeek, and J. M. , Quantum properties of atomic-sized conductors, Physics Reports, vol.377, pp.81-279, 2003.

A. , L. H. Zhang, M. Y. Mayer, J. W. Colgan, E. G. Young et al., Solutions to current crowding in circular vias for contact resistance measurements, Journal of Applied Physics, vol.70, pp.253-258, 1991.

A. , J. Ciftci, and H. , An incremental solution method for rough contact problems, Wear, vol.258, pp.1601-1615, 2005.

B. , M. Yovanovich, M. M. Culham, and J. R. , A Compact Model for Spherical Rough Contacts, Journal of Tribology, vol.127, pp.884-889, 2005.

B. , S. Lantuéjoul, and C. , Use of Watersheds in Contour Detection. International Workshop on Image Processing, 1979.

B. , J. D. Taylor, W. P. Ganesh, B. Price, J. J. Bernstein et al., Year. A hysteresis-free platinum alloy flexure material for improved performance and reliability of MEMS devices, TRANSDUCERS, Solid- State Sensors, Actuators and Microsystems, 12th International Conference on, pp.1152-1155, 2003.
URL : https://hal.archives-ouvertes.fr/in2p3-00008076

B. , C. C. Etsion, I. Kligerman, and Y. , A contact model for a creeping sphere and a rigid flat, Wear, vol.265, pp.598-605, 2008.

B. , A. Dhennin, J. Seguineau, C. Lafontan, X. Dieppedale et al., Methodology to analyze failure mechanisms of ohmic contacts on MEMS switches, In: Reliability Physics Symposium, pp.869-873, 2009.
URL : https://hal.archives-ouvertes.fr/hal-00670200

C. Brown, O. Rezvanian, M. A. Zikry, and J. Krim, Temperature dependence of asperity contact and contact resistance in gold RF MEMS switches, Journal of Micromechanics and Microengineering, vol.19, issue.2, p.25006, 2009.
DOI : 10.1088/0960-1317/19/2/025006

C. J. Brown, Impact of Environmental Conditions on the Contact Physics of Gold Contact RF Microelectromechanical Systems (MEMS) Switches. PhD, 2008.

B. , R. Kleiber, and M. , Statistical Models of Rough Surfaces for Finite Element 3D-Contact Analysis, Archives of Computational Methods in Engineering, vol.16, pp.399-424, 2009.

B. , R. Putterman, and S. J. , Time scales for cold welding and the origins of stick-slip friction, Physical Review B, vol.65, p.235429, 2002.

B. , H. , C. , B. Kappl, and M. , Force measurements with the atomic force microscope: Technique, interpretation and applications, Surface Science Reports, 2005.

C. , Y. Allameh, S. Nankivil, D. Sethiaraj, S. Otiti et al., Nanoindentation measurements of the mechanical properties of polycrystalline Au and Ag thin films on silicon substrates: Effects of grain size and film thickness, Materials Science and Engineering: A, vol.427, pp.232-240, 2006.

C. , W. R. Etsion, I. Bogy, and D. B. , An elastic-plastic model for the contact of rough surfaces, ASME Journal of tribology, vol.109, pp.257-263, 1987.

C. , L. Lee, H. Guo, Z. J. Mcgruer, N. E. Gilbert et al., Contact resistance study of noble metals and alloy films using a scanning probe microscope test station, Journal of Applied Physics, vol.102, pp.74910-74917, 2007.

C. , L. Mcgruer, N. E. Adams, G. G. Du, and Y. , Separation modes in microcontacts identified by the rate dependence of the pull-off force, Applied Physics Letters, vol.93, pp.53503-53506, 2008.

C. , M. Greenwood, J. A. Paggi, and M. , Inclusion of "interaction" in the Greenwood and Williamson contact theory, Wear, vol.265, pp.729-734, 2008.

C. , M. &. Leoci, and F. , An Assessment of the Greenwood- Williamson and Other Asperities Models, With Special Reference to Electrical Conductance, Journal of Tribology, vol.128, pp.10-17, 2006.

C. , M. G. Mikic, B. B. Yovanovich, and M. M. , Thermal contact conductance, International Journal of Heat and Mass Transfer, vol.12, pp.279-300, 1969.

C. , C. Chiesi, L. Garnier, A. Fourrier, J. C. Lapiere et al., Year. A new magnetically actuated switch for precise position detection, Solid-State Sensors, Actuators and Microsystems Conference, pp.861-864, 2009.

D. , B. V. Muller, V. M. Toporov, and Y. P. , Effect of contac t deformations on the adhesion of particles, Journal of Colloid and Interface Science, vol.53, pp.314-326, 1975.

D. , D. J. Dugger, and M. T. , Silicone Oil Contamination and Electrical Contact Resistance Degradation of Low-Force Gold Contacts. Microelectromechanical Systems, Journal, vol.16, pp.24-28, 2007.

D. , D. J. Dugger, and M. T. Year, The effects of surface contamination on resistance degradation of hot-switched low-force MEMS electrical contacts, Electrical Contacts, 2005. Proceedings of the Fifty- First IEEE Holm Conference on, pp.255-258, 2005.

D. , Y. Adams, G. G. Mcgruer, N. E. Etsion, and I. , A parameter study of separation modes of adhering microcontacts, Journal of Applied Physics, vol.103, pp.64902-64911, 2008.

E. , I. Kligerman, Y. Kadin, and Y. , Unloading of an elastic-plastic loaded spherical contact, International Journal of Solids and Structures, vol.42, pp.3716-3729, 2005.

E. , R. W. Wilshire, and B. , Introduction to creep, 1993.

F. , G. Ngan, and A. H. , Effects of creep and thermal drift on modulus measurement using depth-sensing indentation, Journal of Materials Research, vol.17, pp.660-668, 2002.

F. , M. Scorzoni, A. Soncini, and G. , Lateral current crowding effects on contact resistance measurements in four terminal resistor test patterns, IEEE electron device letters, vol.5, pp.524-526, 1984.

F. , A. C. Fortini, A. Mendelev, M. I. Buldyrev, S. Srolovitz et al., Asperity contacts at the nanoscale: comparison of Ru and Au, 10033, USA { m(2) Materials and Engineering Physics, 2004.

F. , A. Mendelev, M. I. Buldyrev, S. Srolovitz, and D. , Asperity contacts at the nanoscale: Comparison of Ru and Au, Journal of Applied Physics, vol.104, pp.74320-74329, 2008.

G. , X. Rezé, and M. , Module système hétérogène ICM3A MEMS & Actionneurs Stratégie d'Intégration, 2006.

G. , K. W. Mall, S. Leedy, K. D. Crawford, and B. , Year. A Nanoindenter Based Method for Studying MEMS Contact Switch Microcontacts, Electrical Contacts Proceedings of the 54th IEEE Holm Conference on, pp.27-29, 2008.

G. , M. &. Dwyer-joyce, and R. S. , Asperity Creep Measured by the Reflection of Ultrasound at Rough Surface Contact, Journal of Tribology, vol.131, pp.21410-21418, 2009.

G. , R. C. Woods, R. E. Eddins, and S. L. , Digital Image processing using MATLAB, Upper Saddle River, N.J, 2004.

G. , J. Tripp, and J. H. , Elastic contact of rough spheres, Journal of Applied Mechanics, vol.34, p.153, 1967.

G. , J. A. Johnson, K. L. Matsubara, and E. , A surface roughness parameter in Hertz contact, Wear, vol.100, pp.47-57, 1984.

G. , J. A. Tripp, and J. H. , Year. The contact of two nominally flat rough surfaces, Proceedings of the Institution of Mechanical Engineers, pp.625-633, 1971.

G. , J. A. Williamson, and J. B. , Electrical Conduction in Solids. II. Theory of Temperature-Dependent Conductors, Proceedings of the Royal Society of London. Series A, Mathematical and Physical Sciences, vol.246, pp.13-31, 1934.

G. , J. A. Wu, and J. J. , Surface roughness and contact: An apology, Meccanica, vol.36, pp.617-630, 2001.

G. , G. Clarke, and D. R. , The interrelation between adhesion, contact creep, and roughness on the life of gold contacts in radio -frequency microswitches, Journal of Applied Physics, vol.100, pp.94904-94914, 2006.

H. , P. Ocon, P. Salvarezza, R. C. Vara, J. M. Vazquez et al., A comparative study of electrodeposited and vapor deposited gold-films : fractal surface characterization through scanning tunneling microscopy Electrochimica Acta, pp.2209-2214, 1992.

H. , D. Mehregany, and M. , Contact physics of gold microcontacts for MEMS switches. Components and Packaging Technologies, IEEE Transactions on [see also Components, Packaging and Manufacturing Technology, Part A: Packaging Technologies, IEEE Transactions, vol.22, pp.357-364, 1999.

J. , R. L. Green, and I. , A statistical model of elasto-plastic asperity contact between rough surfaces, Tribology International, vol.39, pp.906-914, 2006.

J. , M. J. Konstapel, C. Van-kreuningen, A. Verhoeven, J. Van-gastel et al., Automated detection of particles, clusters and islands in scanning probe microscopy images, Surface Science, vol.494, pp.43-52, 2001.

J. , B. Tseng, P. Huang, H. Lee, S. A. et al., Year. Characterization of the Micro Contact Resistance using a Novel On-Chip Apparatus, Solid-State Sensors, Actuators and Microsystems Conference, pp.1653-1656, 2007.

J. , B. D. Chow, L. L. Kuangwei, H. Saitou, K. Volakis et al., Effect of nanoscale heating on electrical transport in RF MEMS switch contacts, Journal, vol.14, pp.935-946, 2005.

J. , B. D. Chow, L. W. Webbink, R. F. Saitou, K. Volakis et al., Year. Force dependence of RF MEMS switch contact heating, Micro Electro Mechanical Systems 17th IEEE International Conference on. (MEMS), pp.137-140, 2004.
URL : https://hal.archives-ouvertes.fr/hal-00023204

J. , B. D. Huang, K. Chow, L. L. Kurabayashi, and K. , Adhesion effects on contact opening dynamics in micromachined switches, Journal of Applied Physics, vol.97, pp.103535-103544, 2005.

J. , B. D. Huang, K. Chow, L. L. Kurabayashi, and K. , Low-force contact heating and softening using micromechanical switches in diffusive-ballistic electron-transport transition, Applied Physics Letters, vol.86, pp.23507-23510, 2005.

J. , B. D. Kuangwei, H. Chow, L. Saitou, K. Volakis et al., Asperity heating for repair of metal contact RF MEMS switches, Microwave Symposium Digest, pp.1939-1942, 2004.

J. , K. L. Greenwood, and J. A. , An Adhesion Map for the Contact of Elastic Spheres, Journal of Colloid and Interface Science, vol.192, pp.326-333, 1997.

J. , K. L. Kendall, K. Roberts, and A. D. , Surface Energy and the Contact of Elastic Solids, Proceedings of the Royal Society of London. A. Mathematical and Physical Sciences, vol.324, pp.301-313, 1971.

K. , Y. Kligerman, Y. Etsion, and I. , Cyclic loading of an elastic plastic adhesive spherical microcontact, Journal of Applied Physics, vol.104, pp.73522-73530, 2008.

K. , F. Miao, J. Oberhammer, and J. , Year. Ruthenium/Gold Hard-Surface/Low- Resistivity Contact Metallization for Polymer-Encapsulated Microswitch with Stress-Reduced Corrugated SiN/SiO2 Diaphragm, MEMS 2009. IEEE 22nd International Conference on, pp.860-863, 2009.

K. Instruments, Low Level Measurements Handbook : Precision DC Current, Voltage, and Resistance Measurements, 2004.

K. , L. Etsion, and I. , Adhesion in elastic-plastic spherical microcontact, Journal of Colloid and Interface Science, vol.261, pp.372-378, 2003.

K. , L. Jackson, and R. L. , A Comparison of Contact Modeling Utilizing Statistical and Fractal Approaches, Journal of Tribology, vol.128, pp.213-217, 2006.

K. , I. S. Kanade, and T. , Extracting topographic terrain features from elevation maps, Journal of Computer Vision, Graphics and Image Processing: Image Understanding, pp.171-182, 1994.

K. , H. Jang, S. Park, Y. Kim, T. Kim et al., Investigation of the electrical contact behaviors in Au -to- Au thin-film contacts for RF MEMS switches, Journal of Micromechanics and Microengineering, vol.18, 2008.

K. , H. Park, J. H. Lee, H. C. Choi, D. J. Park et al., Investigation of Similar and Dissimilar Metal Contacts for Reliable Radio Frequency Micorelectromechanical Switches, Japanese Journal of Applied Physics, vol.47, pp.6558-6562, 2008.

L. , J. D. Timsit, and R. S. , Constriction resistance at high signal frequencies. Components and Packaging Technologies, IEEE Transactions on, vol.25, pp.446-452, 2002.

L. , H. Kim, and S. , Monocrystal elastic constants and derived properties of the cubic and the hexagonal elements Handbook of elastic properties of solids, liquids, and gases, 2000.

L. , H. Coutu, R. A. Mall, S. Leedy, and K. D. , Characterization of metal and metal alloy films as contact materials in MEMS switches, Journal of Micromechanics and Microengineering, vol.557, 2006.

M. , Q. Tran, Q. Chou, T. A. Heck, J. Bar et al., Metal contact reliability of RF MEMS switches, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI, pp.646305-646318, 2007.

M. , O. Aubert, and P. , Mesure de dureté par nano-indentation, 2007.

M. , S. Mcgruer, N. E. Adams, G. G. Zavracky, A. Zavracky et al., Year. Study of contacts in an electrostatically actuated microswitch, Electrical Contacts Proceedings of the Forty-fourth IEEE Holm Conference on, pp.127-132, 1998.

M. , S. Mcgruer, N. E. Adams, G. G. Zavracky, P. M. Morrison et al., Study of contacts in an electrostatically actuated microswitch. Sensors and Actuators A: Physical, pp.19-26, 2001.

M. , B. B. Roca, and R. T. , Solution to contact of 2 rough spherical surfaces, Journal of Applied Mechanics-Transactions of the Asme, vol.41, pp.801-803, 1974.

M. , A. Shi, F. G. Kim, H. K. Okuyama, and K. , Size dependent electrical constriction resistance for contacts of arbitrary size: from Sharvin to Holm limits, Materials Science in Semiconductor Processing, vol.2, pp.321-327, 1999.

M. , N. Kovalev, A. Scharff, W. Ignatiev, M. Vienna et al., The Effect of Adhesion on Sliding Friction at Nanoscale. 3 rd Plastic contact of rough surfaces, Proceedings of the Royal Society of London Series a-Mathematical and Physical Sciences, p.159, 1972.

R. , O. Brown, C. Zikry, M. A. Kingon, A. I. Krim et al., The role of creep in the timedependent resistance of Ohmic gold contacts in radio frequency microelectromechanical system devices, Journal of Applied Physics, vol.104, pp.24513-24518, 2008.

R. , O. Zikry, and M. A. , Inelastic Contact Behavior of Crystall ine Asperities in rf MEMS Devices, Journal of Engineering Materials and Technology, vol.131, pp.11002-11012, 2009.

R. , O. Zikry, M. A. Brown, C. Krim, and J. , Surface roughness, asperity contact and gold RF MEMS switch behavior, Journal of Micromechanics and Microengineering, 2006.

R. , J. &. Frétigny, and C. , Microscopie à force atomique (AFM), 2005.

S. , R. Nix, and W. D. , Effects of the substrate on the determination of thin film mechanical properties by nanoindentation, Acta Materialia, vol.50, pp.23-38, 2002.

S. , P. Banerjee, and A. , Asperity interaction in adhesive contact of metallic rough surfaces, Journal of Physics D: Applied Physics, vol.38, p.4096, 2005.

S. , P. Banerjee, and A. , Asperity interaction in elastic -plastic contact of rough surfaces in presence of adhesion, Journal of Physics D: Applied Physics, vol.38, p.2841, 2005.

S. and J. Year, Contact materials for microrelays In: Micro Electro Mechanical Systems, MEMS 98. Proceedings., The Eleventh Annual International Workshop on, pp.190-194, 1998.

T. , A. Georges, J. M. Loubet, and J. L. , Measurements of intermolecular forces and the rheology of dodecane between alumina surfaces, Journal of Colloid and Interface Science, vol.126, pp.150-163, 1988.

T. , J. W. Uhlman, T. A. Oliver, A. C. Houston, and J. E. , A single asperity study of Au/Au electrical contacts, Journal of Applied Physics, vol.93, pp.4661-4669, 2003.

P. J. Van-zwol, G. Palasantzas, and J. T. De-hosson, Influence of random roughness on the adhesion between metal surfaces due to capillary condensation, Applied Physics Letters, vol.91, issue.10, pp.101905-101908, 2007.
DOI : 10.1063/1.2768919

V. , L. Salvarezza, R. C. Ocón, P. Herrasti, P. Vara et al., Self-affine fractal electrodeposited gold surfaces: Characterization by scanning tunneling microscopy, Physical Review E, vol.49, pp.1507-1511, 1994.

&. Noel and S. Year, Electrical Contact Reliability in a Magnetic MEMS Switch In: Electrical Contacts, Proceedings of the 54th IEEE Holm Conference on, pp.27-29, 2008.

V. , M. Chiesi, L. Rousset, P. Lapiere, C. Poulain et al., Year. An Original Apparatus for Endurance Testing of MEMS Electrical Contact Materials, Proceedings of the 55th IEEE Holm Conference on, pp.14-16, 2009.

W. , W. E. Angadi, S. V. Jackson, and R. L. Year, Electrical Contact Resistance Considering Multi-Scale Roughness, Electrical Contacts Proceedings of the 54th IEEE Holm Conference on, pp.27-29, 2008.

W. , W. E. Angadi, S. V. Jackson, and R. L. , Surface separation and contact resistance considering sinusoidal elastic-plastic multi-scale rough surface contact, Wear, vol.268, pp.190-201, 2010.

Y. , K. Hara, S. Endoh, and T. , Summit identification of anisotropic surface texture and directionality assessment based on asperity tip geometry, International Journal of Machine Tools and Manufacture, vol.41, pp.1863-1871, 2001.

Z. , Y. Chang, and L. , A Model of Asperity Interactions in Elastic -Plastic Contact of Rough Surfaces, Journal of Tribology, vol.123, pp.857-864, 2001.

Z. , Y. Maietta, D. M. Chang, and L. , An Asperity Microcontact Model Incorporating the Transition From Elastic Deformation to Fully Plastic Flow, Journal of Tribology, vol.122, pp.86-93, 2000.

D. , U. Contact, . Electrique, . Avec, . Des et al., 35 FIGURE 14 CONTACT 41 FIGURE 16 FACIES DE RUPTURE FRAGILE (A) 46 FIGURE 18 FLUX, 20 FIGURE 4 USURE DU CONTACT APRES 10 6 CYCLES POUR (A) REPRESENTATION SCHEMATIQUE DES SEPARATIONS FRAGILE (C) ET DUCTILE (D) (FORTINI 79 FIGURE 35 FILM MINCE D'OR (1µM)............................. 86 FIGURE 42 SCHEMA DE PRINCIPE DU NANOINDENTEUR EN CONFIGURATION CONTACT.. 89 FIGURE 43 NANO INDENTER XP DE MTS SYSTEMS CORPORATION, USA. ......................................... 90 FIGURE 44 MICRO-RELAIS DE TYPE PONT FABRIQUE AU LETI SUR UN DESIGN NOVAMEMS. ................. 90 FIGURE, pp.10-13, 1967.

F. , É. De, L. De, B. Consecutifs, M. De et al., 101 FIGUREI = 5 MA PENDANT 400 S POUR (A) ET (B) I = 600 MA PENDANTI = 20 MA PENDANT 400 S POUR (A) ET (B) I = 2 A PENDANT 102 FIGURE 56 FILM MINCE D'OR (1 µM), 107 FIGURE 60 ILLUSTRATION DU PRINCIPE DE DECALAGE DES LIGNES SUR UNE IMAGE BINAIRE) ET (5,4), p.61, 2000.

P. Correspondant, A. Une, D. De-?m, A. Cote, D. De et al., 113 FIGURE 66 ORGANIGRAMME 114 FIGURE 67, FIGURE 75 (A) IMAGE AFM (1*1 µM).. 127 FIGURE 78 (A) IMAGE AFM, pp.4505-654, 2001.

D. De, L. Force, M. Pour, L. Differents, . De et al., 134 FIGURE 83 RAPPORTS, p.142

. Ic_seq, . In_seq, and M. ). Mx, // appel à la fonction inc_prod définie plus haut pour calculer Acn_t*(Acc^-1)*qc // calcul de delta_gn Dg_wig = (z_vec -ones(length(z_vec)))/sum(y_vec)

. Ac_seq=, *ay;sqrt(Pint(2,:)*ax*ay/ %pi)

. Ac_seq=, *ax*ay;ac_vec