Fabrication de smartsensor à basse température utilisant des transistors à effet de champ à grille suspendue : réalisation de pHmètre de grande sensibilité pour le contrôle en continu de la qualité de l’eau potable

Abstract : PH measurement by integrated microelectronic devices has been developed with the advent of devices like ISFET (Ion Sensitive Field Effect Transistor). These devices are limited by Nernst law at 60mV/pH of sensitivities. With the development of micro-technology, the production of sensors type like SGFET (Suspended Gate Field Effect Transistor) became possible. These structures realized by surface micromachining and conventional MOS processes can achieve much higher sensitivity. After a review of different methods of measuring pH and their basic principles, the document describes the manufacturing processes of microelectronics sensors SGFET. Then this work deals with the design and implementation of an automated measurement of pH system. This system is based on sensors SGFET arranged in a matrix. This manuscript presents firstly the various options of sensors bias and in a second part, it develops the system architecture. Finally first results on matrix are presented. Thus the best measurement protocol to ensure reliability and good sensitivity here is a few seconds duration sampling of the drain current with a constant gate and drain voltage. This method has achieved reproducibility in the pH sensitivity and reliability over time that could even lead to measures of the order of 150 hours. The design of an addressing and automated measurement system has allowed to take advantage of this matrix aspect by making statistical treatment of measurements and thus approach a fully operational system.
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Submitted on : Wednesday, January 15, 2020 - 4:23:03 PM
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Bruno da Silva Rodrigues. Fabrication de smartsensor à basse température utilisant des transistors à effet de champ à grille suspendue : réalisation de pHmètre de grande sensibilité pour le contrôle en continu de la qualité de l’eau potable. Micro and nanotechnologies/Microelectronics. Université de Rennes1, 2011. English. ⟨tel-02441208⟩

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